Analytical equipment: (DM) FE-SEM/EDS/WDS/EBSD (Ultra Plus)

FE-SEM/EDS/WDS/EBSD (Ultra Plus)   

What is it?
High-resolution Imaging and elemental analysis

Manufacturer: Carl Zeiss

Model Name: Ultra Plus

Applications:
** High resolution imaging at low accelerating voltage (0.5 kV) for non-conductive sample
** 2D EDS/WDS

Instrument Overview: Carl Zeiss ULtra Plus FESEM is a ultra high resolution FESEMs for simultaneous BSE & SE real-time imaging. The EDS (energy dispersive X-ray analyzer) and WDS (wavelength dispersive X-ray analyzer) analyzes elements in a specimen. The quantitative analysis calculates concentration of elements. The elemental maps show the distribution of elements.

Technical features and specifications:

** Resolution: 1.0nm @ 15kV, 1.7nm @ 1kV, 4.0 nm @ 0.1kV
** Magnification: 12 - 1,000 kx in SE mode, 100 - 1,000 kx with EsB detector

Charges:
TBA

Instrument Manufacturer URL: https://www.zeiss.com/microscopy/int/products/scanning-electron-microscopes.html

Detailed Specifications:
Detectors:
** In-lens Energy Selective Backscatter (EsB) detector -- compositional information
** Angle Selective Backscatter (AsB) detector -- material contrast and topographical information
** Low kV BSE imaging at WD: 1 mm
** In-lens Secondary Electron detector -- high contrast topographic imaging
** Local Charge Compensator (CC) -- imaging of non-conductive samples
** Emitter: Thermal field emission type, stability >0.2%/h
** Acceleration Voltage: 0.02 kV - 30kV Probe Current: 4pA – 20 nA