Characterisation: Surface Profiler @C5 (KLA Tencor P16)

"What is it?
A contact stylus tool for surface profiling of substrate

Manufacturer: KLA Tencor

Model Name: P16

Applications: Step Height Measurement. Surface Roughness

Instrument Overview: The KLA-Tencor P-16 Profiler is a highly sensitive surface profiler that measures step height, surface roughness, waviness and film stress curvature on sample surfaces. System uses stylus-based scanning which remains in constant contact with the sample surface by means of a user-specified force to achieve high resolution.

Technical features and specifications:
Maximum scan length: 80mm. Sampling rate: 5Hz to 2000Hz. Scan Speed: 2um/sec to 25mm/sec. Applied Force: 0.5 to 2.0mg

Charges:
NA

Instrument Manufacturer URL: https://www.kla-tencor.com/

Detailed Specifications:
NA

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