What is it?
68-CLN-MetalBench
Manufacturer: APET Nextation system
Model Name: NT-247 Semi-Automatic Acid Wet Bench
Applications: Semi-Automatic Acid Wet Bench with a variety of 4 Chemical Tanks for Wet etching processes
Instrument Overview: Wet etch processes: DHF,SPM,Ru etch, HCL; Robot capable to handle 1 PFA Carrier at each time for either 6” or 8”. For 6”, extra jig will be included to support 6” cassette; QDR tank available for each designated chemical tank; Additional final DI Water rinse tank (with Megasonic capabilities) to ensure that the wafer is thoroughly clean; Resistivity Meter in DI Water rinse tank to ensure wafer is chemical free and clean; IPA Dryer tank capable of drying wafers using IPA mist with hot and cold PN2 blow
Technical features and specifications:
Bridge Tool (Capable of handling 6” & 8” Silicon or SiC wafers).
Robot picks up Jig to accommodate 6” & 8” wafer cassette
Charges:
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Instrument Manufacturer URL: NA
Detailed Specifications:
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