Etching: Advance Dielectric Etch Deep RIE (SPTS)

 What is it? 
   A tool for dielectric etch.
 
  Manufacturer:  SPTS
 
  Model Name:  SPTS APS
 
  Applications:  Dielectric etch, Si etch, DRIE Si, no metal
  
  Instrument Overview:  ICP-RIE (Inductive Coupled Plasma Reactive Ion Etching) system consisting of 1 etching chamber and 1 loadlock chamber equipped with robot handling for wafer transfer. Fluorine-based etching system equipped with in-situ endpoint detection technique for plasma dry etching. .
  
  Technical features and specifications: 
   WAFER SIZE: 8 inch
  Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL: https://www.spts.com/
 
  Detailed Specifications: 
   https://www.spts.com/categories/plasma-etch/