What is it?
68-FUR-FGAnneal
Manufacturer: SVCS
Model Name: Forming Gas Atmospheric Furnace
Applications: Release of MEMS structure such as pressure sensors, accelerometers, gyroscopes, microphones, infrared imagers, optical MEMS, RF filters
Instrument Overview: Automatic Wafer Loading System. Motorized wafer loading robotic arm transfers wafers between cassette and boat; Two interchangeable quartz boats; 3 pcs of dual spike TCs (control and overtemperature sensing). Type S. 0.5mm diameter TC wire covering Load Zone, Center and source zone.
Technical features and specifications:
Atmospheric Metal Alloy with Forming Gas with 6inch and 8inch wafers.
4 temperature: Forming Gas anneal; 300-500°C; N2 Anneal:300-800°C.
Charges:
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Instrument Manufacturer URL: NA
Detailed Specifications:
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