Lithography: Glovebox with Lithography (Heidelberg-Ins)

What is it?
 A glovebox integrated nanolithography system for writing sub-micron features.

Manufacturer:  Heidelberg-instruments

Model Name: N/A

Applications:  For 2D material lithography.

Instrument Overview:  N/A

Technical features and specifications:
< 100 nm lateral resolution. Write field size > 20 um by 20 um Writing speed > 200 um^/min Tip heater range > 900 oC

Charges:
 N/A 

Instrument Manufacturer URL:  https://heidelberg-instruments.com/

Detailed Specifications:
NA