2 Fusionopolis Way, Innovis, #08-03 Singapore 138634
What is it?
A wafer bonding tool that supports all common wafer bonding processes such as anodic, glass frit, solder, eutectic, transient liquid phase, and direct.
Manufacturer: EVG
Model Name: EVG510-200
Applications: Wafer bonding
Instrument Overview: Bonds up to 60 kN force at temperatures up to 550°C
Technical features and specifications:
Can handle substrate sizes from pieces to 200 mm.
Charges:
User operated: NA/hour, Staff operated: NA/hour
Instrument Manufacturer URL: https://www.evgroup.com/
Detailed Specifications:
https://www.evgroup.com/products/bonding/permanent-bonding-systems/evg510/
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