A*STAR Scientific Equipment Finder

Mechanical processing: Wafer Bonder System (EVG 510/200)

equipment

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

 What is it? 
   A wafer bonding tool that supports all common wafer bonding processes such as anodic, glass frit, solder, eutectic, transient liquid phase, and direct.

Manufacturer: EVG

Model Name:  EVG510-200

Applications: Wafer bonding
  
Instrument Overview: Bonds up to 60 kN force at temperatures up to 550°C
  
Technical features and specifications: 
   Can handle substrate sizes from pieces to 200 mm.
Charges:
   User operated: NA/hour, Staff operated: NA/hour

Instrument Manufacturer URL: https://www.evgroup.com/

Detailed Specifications: 
   https://www.evgroup.com/products/bonding/permanent-bonding-systems/evg510/

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