A*STAR Scientific Equipment Finder

Metrology: 08-MET-HgProbe

equipment

What is it?
Hg probe CV measurement system

Manufacturer: SSM

Model Name: 495

Applications: Dielectric on Si from small pieces (2x2 cm2) up to 6, 8-inch wafers and Si are acceptable

Instrument Overview: automatic mapping system provides a variety of electrical characterization measurements for non-patterned wafers used in epitaxial silicon and front-end semiconductor process development and production

Technical features and specifications:
dielectric constant
dielectric breakdown voltage
dielectric leakage current

Charges:
Contact Admin

Instrument Manufacturer URL: NA

Detailed Specifications:

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