A*STAR Scientific Equipment Finder

Metrology: 12-MET-TSV-Scope

equipment

Institute of Microelectronics (IME)

What is it?
12” microscope with auto loader

Manufacturer: Olympus

Model Name: AL-120-LMB128-LP3

Applications: 12inch microscope with auto loader is able to inspect 300mm wafer from FOUP

Instrument Overview: 12” microscope with auto loader

Technical features and specifications:
Macro inspection can inspect wafer edge and backside.
Switching between 200 and 300 mm production with no downtime

Charges:
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Instrument Manufacturer URL: NA

Detailed Specifications:

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