What is it?
68-MET-DRSEM
Manufacturer: Applied Materials
Model Name: SEMVision G3
Applications: • Auto defect review (ADR) algorithms and imaging
EDX material analysis
Column tilt and wafer rotation
In line FIB
Multi perspective imaging
Instrument Overview: SEMVision G3 Focused Ion Beam (FIB) use high-resolution imaging and energy dispersive x-ray (EDX) material analysis information for root cause analysis, thereby reducing the cycle times needed to identify failures and drive corrective actions
Si / GaN on Si
Technical features and specifications: Bridge tool for 150 and 200mm
Wafer substrate material :Si / GaN on Si, SiC, Glass
Focused Ion Beam (FIB) Milling capability
360-degree Wafer Bevel Review (WBR) capability
Charges:
Contact Admin
Instrument Manufacturer URL: NA
Detailed Specifications:
Other Equipment from IME
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