equipment
What is it?
Surface and Photoluminescence Defect Inspection System
Manufacturer: KLA
Model Name:
Applications: Advanced characterization of substrate and epitaxial defects
Instrument Overview: defect from Bare Si, SiC, SiC Epi, GaN-SiC, GaN-SI
Technical features and specifications:
Wafer Size Supported: 6 & 8inch
Wafer Types Supported: Si, SiC. Al2O3 (DSP) and Glass requires wafer test confirmation
Charges:
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Instrument Manufacturer URL: NA
Detailed Specifications:
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