Metrology: A High Precision 3D Profilometer

What is it?
This is a high precision stylus profilometer to conduct diameter/radius, surfcae topography deviation measurement, suhch as lens/mold form error measurement

Manufacturer: Panasonic

Model Name: UA3P

Applications: Applications of this system include measurements of nano-scale surface topography in semiconductor, precision engineering, Optics lens/mold production industrial sectors.

Instrument Overview: The system is based on a precision stage with position measured by He-Ne laser interferometers that provide direct traceability to the SI metre. The stylus moves in Z-axis and its contact with the part is controlled using a detection scheme similar to atomic force probe.

Technical features and specifications:
Direct traceability to SI metre Measuring range: 30 mm x 30 mm x 20 mm Measuring resolution: 3 nm Maximum measuring angle: 75° Stylus Radius: 2 μm(Diamond); 0.5 mm(Ruby) Probing force: (150 to 300) μN

Charges:
Subjected to actual measurement tasks

Instrument Manufacturer URL: https://www.panasonic.com/global/business/ua3p.html

Detailed Specifications:
Specifications - Ultrahigh Accurate 3-D Profilometer UA3P - Panasonic Global