Metrology: AMA-Atomic Force Microscope

What is it?
A Large Scanning Range Metrological-Atomic Force Microscope (LRM-AFM) to calibrate of step height, 1D & 2D pitch standards

Manufacturer: SIOS Messtechnik GmbH

Model Name: NMM-10

Applications: It is capable of providing a direct traceability of step height measurement & calibration to disseminate a higher accuracy to those commercial AFMs and high resolution 3D optical microscope for their surface topography measurements. It covers those applications in micro- & nano-scale structure measurements in the fields of MEMS, semiconductor, precision engineering and photonics industrial sectors.

Instrument Overview: This system combines an AFM head and a nano-scale 3D moving stage together with 3 He-Ne laser intererometers along X, Y and Z axes installed in its metrological frame, which provides direct traceability lacked by commercial AFMs. The system is also featured with a very large scanning range and small uncertainty for measurement of surface texture of micro- and nano-structures at sub-nanometre resolution.

Technical features and specifications:
Direct traceability to the SI unit for length Abbe free measurement Large scanning range: 25 mm x 25 mm x 5 mm Resolution: 0.1 nm Low uncertainty: 10 nm for both step height and pitch measurements Both contact and non-contact measurements

Charges:
Subjected to actual measurement tasks

Instrument Manufacturer URL: https://sios-de.com/

Detailed Specifications:
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