A*STAR Scientific Equipment Finder

Metrology: Atomic Force Microscope

equipment

8 Cleantech Loop #01-20 Singapore 637145

What is it?
Atomic Force Microscope for measuring nano-structure

Manufacturer: Bruker

Model Name: Dimension V 3100

Applications: Applications of atomic force microscopy (AFM) include measurements of nano-scale surface topography in semiconductor, precision engineering, photonics and additive manufacturing industrial sectors.

Instrument Overview: Atomic Force Microscope (AFM) with contact & non-contact mode is one of the most powerful tools for measurement of surface texture of micro- and nano-structures at sub-nanometre resolution with wide applications in nanotechnology. Acoustical enclosure and anti-vibration are installed to ensure the measurement stability preventing from external disturbances.

Technical features and specifications:
Measurement volume: 90 μm × 90 μm × 8 μm (x, y and z axes) Open loop noise level in z axis :0.05 nm (RMS — the root mean square average of the noise) Close loop noise level in z axis: 0.06 nm (RMS) Open loop noise level in x & y axes: 1.5 nm (RMS) Close loop noise level in x & axes: 1.8 nm (RMS)

Charges:
Subjected to actual measurement tasks

Instrument Manufacturer URL: https://www.bruker.com

Detailed Specifications:
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