equipment
What is it?
Wafer Surface Inspection System
Manufacturer: KLA
Model Name: SP2
Applications: Ability to generate SURF image which is a high resolution scattering image of the entire wafer/ UV dark field optical design that provides significantly improved sensitivity on all film types and thickness
Instrument Overview: Surface-quality monitoring.
Technical features and specifications:
Non destructive
Max image size >45um x, >45um nominal
Stage: Auto
Charges:
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Instrument Manufacturer URL: NA
Detailed Specifications:
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