Metrology: Confocal Microscope

What is it?
This laser confocal microscope is used to conduct surface topography measurement (e.g., step height standard)

Manufacturer: Mahr

Model Name: Nanofocus

Applications: 3D surface geometrical structures’ measurement in diverse industry sectors, such as Advanced Manufacturing, Aerospace, Precision Engineering, Oil & Gas, Medical Technology, Additive manufacture and etc.

Instrument Overview: The laser confocal microscope is one of non-contact methods to carry out surface profile measurement with sub-micrometre accuracy on both smooth and rough surfaces. An illuminated pinhole by a laser diode (LD) is imaged onto the test surface. The photo-detector registers a surface contour only if the focal plane matches with a point on the real surface.

Technical features and specifications:
Vertical Resolution: 20 nm Long Working Distance: 13 mm Focused laser spot: 1 µm Large lateral range: 200 mm x 200 mm

Charges:
Subjected to actual measurement tasks

Instrument Manufacturer URL: Mahr Group – Mahr Gruppe

Detailed Specifications:
NA