Nanoimprint: NanoImprint Lithography System (Obducat 2)

"What is it?
A Nano Imprint Lithography (NIL) tool that performs pattern replication in the micro and nanometer range on soft and hard substrates.

Manufacturer: Obducat Technologies AB

Model Name: NIL-60-SS-UV (Serial No. 60-02-019)

Applications: The tool is suitable for research and development within application areas such as solid state lighting, micro-optical and photonic components, bio-medical and life sciences devices, MEMS/NEMS and semiconductors.

Instrument Overview: The tool can perform thermal NIL and UV NIL imprinting.

Technical features and specifications:
Imprint Pressure : 10bar (Min) to 80bar (Max) Imprint area : up to 150 mm diameter Total imprint stack up : preferably be less than 2 mm Thermal temperature : Ambient (Min) up to 200 ⁰C (Max)

Charges:
NA

Instrument Manufacturer URL: www.obducat.com

Detailed Specifications:
NA

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