Thin film deposition: ALD System (Ultratech Savannah 200)

 What is it? 
   Atomic Layer Deposition System for Al203 and Hf02 film.
 
  Manufacturer:  Ultratech
 
  Model Name:  Savannah 200
 
  Applications:  Thin film depositionbr>  
  Instrument Overview: THERMAL DEPOSITION
  
  Technical features and specifications: 
   WAFER SIZE FROM 2 TO 12 INCH
  Charges:
   User operated: NA/hour, Staff operated: NA/hour
 
  Instrument Manufacturer URL:https://www.veeco.com/
 
  Detailed Specifications: 
   https://www.veeco.com/products/savannah-thermal-ald-for-rd/