Thin film deposition: Beneq TFS 200 Basic System

What is it?
Main ALD tool in Kinesis level 4 cleanroom.

Manufacturer: Beneq

Model Name: TFS 200

Applications: Physical vapour deposition

Instrument Overview: This equipment accepts 8Inch wafer. Thickness less than 1 cm

Technical features and specifications: Heating up to 450Degrees C. 4 cold source, 2 hot source. Ozone generator in built. NH3 source available.


Charges:
NA

Instrument Manufacturer URL: https://beneq.com/en/

Detailed Specifications: https://beneq.com/en/products/research/tfs200/