A*STAR Scientific Equipment Finder

Thin film deposition: Electron Beam Evaporation System (Angstrom EvoVac)

equipment

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

 What is it? 
   An Evaporation system using Electron beam.

Manufacturer:  Angstrom Engineering

Model Name:  EvoVac

Applications:  Thin Film Deposition - most metal(no oxide, no copper) eg.  Ag, Al, Au, AuGe, Cr, Ge, In, Ni, Pd, Pt, Ru, Ta, Ti, Zn.
  
Instrument Overview:  Metal deposition of thin film, from few nm to few hundred nm thick, depending on the material.
  
Technical features and specifications: 
   The electron beam is generated from a filament and steered via electric and magnetic fields to strike source material (e.g. metal pallet) and vaporize it within a vacuum environment.
Charges:
   User operated: NA/hour, Staff operated: $250/hour + precious metal

Instrument Manufacturer URL: https://angstromengineering.com/

Detailed Specifications: 
   https://angstromengineering.com/products/evovac/

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