Thin film deposition: PEALD system (PicoSun Sunale R-200)

What is it?
Atomic layer deposition system for Al203, Ta205 and Ti025 film.

Manufacturer: PicoSun

Model Name: Sunale R-200

Applications: Thin film deposition

Instrument Overview: Capable of thermal and plasma process.

Technical features and specifications:
Substrate size from small coupons to 8 inch wafer
Charges:
User operated: $NA/hour, Staff operated: $NA/hour

Instrument Manufacturer URL:https://www.picosun.com/

Detailed Specifications:
https://www.picosun.com/products/research/picosun-r200-advanced/