A*STAR Scientific Equipment Finder

Thin film deposition: Sputtering system (SYSKEY SP-LC6A03)

equipment

2 Fusionopolis Way, Innovis, #08-03 Singapore 138634

What is it?
A magnetron controlled sputtering using either RF or DC power supply.

Manufacturer: SYSKEY

Model Name: SP-LC6A03

Applications: Uses evaporated Chalcogen as vapour reactive source.

Instrument Overview:

Technical features and specifications:


Charges:
NA

Instrument Manufacturer URL: NA

Detailed Specifications:

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