equipment
What is it?
Charger UBM PVD System
Manufacturer: AMAT
Model Name: Charger-UBM
Applications: Thin film deposition by physical vapour deposition in an ultra-high vacuum (UHV) process chamber
Instrument Overview: Sputter Titanium (Ti) and Copper (Cu) films
Technical features and specifications:
Under Bump Metallization (UBM)
Redistribution Layer (RDL)
CMOS image sensor applications
Charges:
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Instrument Manufacturer URL: NA
Detailed Specifications:
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