A*STAR Scientific Equipment Finder

ThinFilm: BR-FUR-Curing

equipment

Institute of Microelectronics (IME)

What is it?
Batch vertical furnace

Manufacturer: SPTS

Model Name: RVP-300plus

Applications: Polyimide Curing, Passivation Dielectric Cure, Metal Annealing

Instrument Overview: Vertical batch furnace with leading productivity and low cost of ownership (CoO) on 200 and 300 mm wafers

Technical features and specifications:
Temperature range from 100C to 600C
Processes to 32nm technology node
Polyimide Curing
Passivation Dielectric Cure

Charges:
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Instrument Manufacturer URL: NA

Detailed Specifications:

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